| Publons ID | 19503927 |
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| Wos ID | WOS:000232189100345 |
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| Doi | |
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| Title | A humidity repellent and acid-proof self-assembling passivation for gas sensors and transducers with open surfaces |
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| First Author | |
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| Last Author | |
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| Authors | Knittel, T; Freitag, G; Widanarto, W; Eisele, I; |
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| Publish Date | 2005 |
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| Journal Name | Transducers '05, Digest of Technical Papers, Vols 1 and 2 |
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| Citation | |
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| Abstract | Self assembling mono layers are used to fabricate a humidity repellent and acid-proof film for transducer surface passivation. This protection can be used for silicon containing surfaces, like SiO2 or Si3N4, as well as for aluminium. Etching tests with aggressive acids have shown a more than tenfold higher etching time for 110 nm aluminium layers in the case of protected surfaces. The hydrophobic characteristics are used in a gas sensor to prevent the unintentional ionic drift by surface currents. Stable operation of the gas sensors in environmental condition with r.h. up to 95% is possible. |
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| Publish Type | Book |
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| Publish Year | 2005 |
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| Page Begin | 1400 |
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| Page End | 1403 |
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| Issn | |
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| Eissn | |
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| Url | https://www.webofscience.com/wos/woscc/full-record/WOS:000232189100345 |
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| Author | Dr R WAHYU WIDANARTO, S.Si, M.Si |
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| File | 2772.pdf |
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